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MAE249/EECS 279: “MicroSensors and Actuators” Fall 2021
University of California - Irvine Ó Copyright, Prof. Andrei M. Shkel
Final Design Project: Design of micromachined resonator (due Nov 30th in class).
Grading: The final project is 65% of your final grade. Tentative grading of the project – proposal/progress report (5%)
+ final design / layout / modeling (15%) + 6 pages written report (30%) + oral presentation (15%). You are highly
encouraged to use L-Edit for your layout and CoventorWare for detailed modeling.
The design project is a limited experience aimed at developing the ability to consider a variety of issues in a typical
design challenge (one without a unique solution). This is an individual project, and students will need to work
independently. The task will be to design the device according to specifications, perform a literature search, account for
imperfection in the process, discuss performance of the device, prepare and submit a mask layout along with 6 pages
final report documenting the design process (in the IEEE two-columns format, a template is on class’s website).
Problem Statement
Quartz crystal oscillators are widely used to generate precision frequency standards for complex integrated circuits and
sensors. The majority of applications that use crystal oscillators – from timekeepers in simple wristwatches to local
oscillators in complex communication links – specifically take advantage of the extremely stable frequency (and
amplitude) they generate. Unfortunately, crystal oscillators cannot be integrated on the same substrate with the circuit,
i.e. conventional quartz oscillators are not IC compatible. The rapid growth of micromachining technologies makes
feasible another mechanical resonator-based approach to realize integrated high-Q tanks and enable new type of sensors
such as gyroscopes, high precision resonating pressure sensors and accelerometers, mass measuring devices
(microbalance), chemical and biological sensors, etc. In this project, we will explore the design, fabrication, and
performance issues of high Q-oscillators utilizing MUMPs processes (PolyMUMPS, SOIMUMPs, PiezoMUMPs) which
can be potentially integrated on the same chip with integrated circuit or using heterogeneous integration. You are
encouraged to read Chapter 21 of your textbook to identify an application for your resonator (you may select the target
application not listed in Chapter 21). However, you are not limited to those applications and can find many exciting
applications in on-line articles, magazines, research papers, patents, etc.
Design Specifications
Your resonator should have a stable frequency of oscillation at 10 kHz, the resonator should be implementable in
Poly-MUMPs , SOIMUMPs, or PiezoMUMPs processes, and the resonator should be able to operate on a 5V lithium
battery. The ONLY SPECIFICATIONS you are required to meet are these three (in bold font). To help you to start
your design process, you are given parameters below for a surface micro-machined oscillator. These parameters are not
your design specifications and don’t have to be met, and are provided merely as a starting point for your design.
Parameter Description Value
Drive mode resonance frequency - requirement !
m Proof mass
Drive mode quality factor 10,000
Amplitude of Oscillation
Sense capacitance associated with the
resonator
Drive capacitance associated with the
resonator
Sense Voltage bias 1[V]
V Voltage produced by the power source 5[V] or less - requirement !
nw ][10 kHz
][102 11 kg-´
nQ
0X ][2 mµ
sC ][4 fF
DC ][4 fF
SV
MAE249/EECS 279: “MicroSensors and Actuators” Fall 2021
University of California - Irvine Ó Copyright, Prof. Andrei M. Shkel
Objective
You need to explore design options presented in the class, discuss advantages and disadvantages of each
option, and propose a design which meets the three specifications above: (1) use one of the MUMPS
processes, (2) 10 kHz drive frequency of operation, (3) 5 [V] power source. Consider different designs of
suspension, electrodes (lateral, parallel, shaped etc.), circuit architecture, tuning possibilities, etc. DO NOT
just reproduce the comb-drive resonator presented during the class. This was just an example.
The specific goal of this project is to design a micro-resonator 1) implemented using a MUMPS process
technology; (2) utilizes the closed loop drive and sense actuation to provide a stable frequency of oscillation
@ 10 kHz; (3) operate on a single lithium micro battery supplying 5V.
System Design
Survey the literature and decide on the basic architecture of the device. (There should be recent literature on
silicon microresonators or sensors utilizing stable microresonators). Prof. Clark Nguyen and his group at
Berkeley have done pioneering work in design and fabrication of MEMS resonators. There are also papers
from Prof. Ayazi group at GeorgiaTech, and the Prof. Roger Howe group at Stanford., Prof. Mina Rais-
Zadeh from University of Michigan, Prof. Thomas Kenny at Stanford, and an early work by Prof. William
Tang (now at UCIrvine). More recently, the group of Prof. Gianluca Piazza from CMU has been productive
(you can find a recent book on-line “Piezoelectric MEMS Resonators”, for example). You are encouraged to
read Chapter 21 of your textbook and find some very recent papers in the electronic collection of the UCI
library. The most recent publications on the topic are highly encouraged. Also, explore some recent industrial
stories and design philosophies on development of clocks from SiTime, Silicon Labs, Discera, Sand9, and
more. You will need to use this information in your final report, when discussing the state of the art.
Review Reader 5 and Reader 6. Look for pros and cons of your design. Create a lumped model to set the design
flow and the electrical performance. Select dimensions and architecture of the mass, suspension, type of
actuator (lateral or parallel plate, single-sided actuation or two-sided actuation, and the drive/sense electrodes).
Be innovative. Learn from designs of others but add something of your own.
Overview
The design process is described below in terms of several distinct tasks. However, it will be quickly recognized
that all these tasks interconnected. The goal of the designer to iterate between the tasks until the final device
design meets requirements.
First-Order Device Concept
Select the materials, geometry, and fabrication process (for example, even if you select Poly-MUMPs, you
can still decide on the layers you want to use – Poly1, Poly2, Poly1+Poly2). This will require a determination
of the device geometry required to achieve the right resonance frequency (a combination of mass and spring
values; you can use as a starting point the parameters provided in the table).
First-Order Circuit Design
Sketch your design. Estimate the parasitic capacitance coupling the resonator ports. Sketch the electro-
mechanical model with the parasitic elements which influence the device’s electrical characteristics.
Select electrode configuration and design a circuit configuration which will drive the device into oscillation at
a stable amplitude. Explore the effects of parasitic elements. Explore how the effect of parasitics can be
eliminated.
MAE249/EECS 279: “MicroSensors and Actuators” Fall 2021
University of California - Irvine Ó Copyright, Prof. Andrei M. Shkel
Coupled Modeling
Explore the interaction between the resonator and the circuit. How the parasitic elements, stochastic noise
elements (such as Brownian Noise), non-linearity in actuation and detection are affecting the characteristics
you are trying to achieve.
Second-order Effects
Since the resonator will be small, how much variation in behavior (e.g., change is resonance frequency) is
expected if fabrication tolerances are within 5%? How much variation is expected if the temperature is
changing from -55F to +85F. How can the device be calibrated or tuned to compensate for fabrication
imperfections and temperature variations ? How will you tune your device to meet the design objective ?
What is the effect of ambient temperature and a possible leak/change of vacuum ? What are the different
energy loss mechanisms? Explore all these options.
Integrate the Design
Iterate as needed to verify that the device concept, circuit design, fabrication process, and packaging scheme
work together to meet the required specification.
Proposed Flow of your project:
1. Decide on the problem you are trying to solve with the resonator (i.e., find some exciting application).
2. Consider as a first iteration of the design the idea of a classical micro-resonator discussed in class or
somebody’s else idea discussed in patents, publications, etc. But remember, you should be able to implement
it in the MUMPS processes and add some of your own ideas !
3. Explore alternative proof-mass, suspension, and electrode designs. Comment on rational of your decisions.
(review Reader 5)
4. Estimate in-plane and out-of-plane frequency of the device. Estimate how much the resonator will move in
out of plane as a result of levitation force. Propose methods for minimizing the out-of-plane motion.
5. Consider Single-sided and Double-sided actuation. Select the type of actuation you think is appropriate.
6. Estimate vacuum packaging requirements to meet the specifications.
7. Decide on the architecture of electrodes meeting the design requirements.
(review Reader 6)
8. Sketch an architecture of the control electronics for the resonator. It should include an oscillator circuit for
driving the device at resonance, stabilizing the amplitude. Derive the gain of the trans-resistance amplifier
that will allow to overcome the damping (decide on the packaging pressure).
9. Perform modeling of the response of the overall electro-mechanical system. Does the proposed architecture
drive the device at resonance? Does the parasitic capacitance have any effect on the device performance? How
these issues can be resolved ? Does the proposed architecture allow the resonator to keep constant amplitude
MAE249/EECS 279: “MicroSensors and Actuators” Fall 2021
University of California - Irvine Ó Copyright, Prof. Andrei M. Shkel
of oscillations? If not, how would you suggest improving the design of the control system? How would you
tune, if needed, the frequency of oscillation?
10. Propose a noise model and parasitic capacitance model of the resonator you designed (also include drive
and sense capacitance). Discuss the effect of model parameters on performance.
11. Address the first-order and the second order design objectives.
Project Proposal
1 page text and 1 page figures (this is your entire proposal). See the submission deadlines below. The style of
this document should grasp attention (well written, nicely formatted, and containing a persuasive description
of your product). No more than one-page text (600 words of text + references) and one page of pictures are
allowed.
Make sure to include the following: (1) Pick a title, reflecting the chosen application of your resonator, (2)
clearly identify the motivational application and the problem your oscillator is trying to solve, (3) perform a
preliminary design and a preliminary analysis showing that the project goals are feasible with your
preliminary design, (4) include at least 5 recent references (2 journal papers, 2 conference papers, 1 patent)
Project Progress Reports
There is no page limit. See the submission deadlines below. In your Progress Report 1 address items 1-7
from the proposed flow of your project (you can change design parameters later if necessary). In your
Progress Report 2 address items 8-11 from the proposed flow of your project (again, you can change design
parameters later if necessary). Your progress reports should address “The first Order Effect” of the design
(see above). Add “The second Order Effects” of your design in the Final Report. Submit your progress report
files, name them your_name_progress_reportX.pdf (I suggest you use the IEEE template, the same template
you will be using for your final report). Upload your progress report files in Canvas.
Submission of your final project
(1) Before the Due Date. Submit a well written report addressing ALL design issues (along the lines of the
proposed design flow). Name your report, your_name_final_project_report.pdf The report should be well
written, 6 pages, using the template provided. The report should include a brief literature survey relevant to
the assigned project (at least 5 recent and highly cited references from the major Journals and Conferences:
at least 2 conference papers, 2 journal papers, 1 patent). You are required to submit on the Due Date:
(1) On Due Date. a hard copy of your final report, (2) upload an electronic copy of your final report
(Upload your file in Canvas):
o Some typical sections of the report: Title, Abstract, Introduction, Theory, Modeling,
(Experiments), Discussion, Conclusions, Acknowledgments, References.
(2) On Due Date. Submit a layout file: your_name_final-project_MUMPs.tdb. Include in the final report the
cross section showing anchors, suspension, electrodes, etc. (you are free to decide what cross-section to pick
to make it a representative cross-section showing the most important features of your design). Upload your
file in Canvas
(3) On Due Date. Submit your Oral presentation slides: your_name_oral_presentation.pdf. Your
presentation is limited to 3 minutes and 3 slides maximum (+1 a title slide). Upload your file in Canvas.
The recommended format:
Slide 0 – Title of your project, reflecting the application of your resonator. Don’t forget to include your name
Slide 1 – The motivational application (find something really, really, really exciting)
MAE249/EECS 279: “MicroSensors and Actuators” Fall 2021
University of California - Irvine Ó Copyright, Prof. Andrei M. Shkel
Slide 2 – Explain your design (sketch of design, layout, electronic schematics). Make it concise and clear
Slide 3 – Show results proving that you met the design objective of the final project and considered all
relevant issues recommended in the design flow (include design parameters, modeling results, etc.)
Project Milestones:
• Nov 4th, project assigned
• Nov. 9th , submit your proposal, discussing application, intended design, and preliminary design
parameters showing that you have a chance meeting project objective with the chosen design
• Nov. 16th . Submit your progress report 1 addressing items 1-7 of the proposed flow above.
• Nov. 23rd . Submit your progress report 2 addressing items 8-11 of the proposed flow above.
• Nov. 30th . Submit your final report (hard copy to be submitted before class and soft copies of
your report, layout, and Power Point slides are uploaded in Canvas)
• Nov. 30th & Dec. 2th. Oral presentations. Your presentation is limited to 5 minutes (4 slides
maximum, including the title slide)
学霸联盟
University of California - Irvine Ó Copyright, Prof. Andrei M. Shkel
Final Design Project: Design of micromachined resonator (due Nov 30th in class).
Grading: The final project is 65% of your final grade. Tentative grading of the project – proposal/progress report (5%)
+ final design / layout / modeling (15%) + 6 pages written report (30%) + oral presentation (15%). You are highly
encouraged to use L-Edit for your layout and CoventorWare for detailed modeling.
The design project is a limited experience aimed at developing the ability to consider a variety of issues in a typical
design challenge (one without a unique solution). This is an individual project, and students will need to work
independently. The task will be to design the device according to specifications, perform a literature search, account for
imperfection in the process, discuss performance of the device, prepare and submit a mask layout along with 6 pages
final report documenting the design process (in the IEEE two-columns format, a template is on class’s website).
Problem Statement
Quartz crystal oscillators are widely used to generate precision frequency standards for complex integrated circuits and
sensors. The majority of applications that use crystal oscillators – from timekeepers in simple wristwatches to local
oscillators in complex communication links – specifically take advantage of the extremely stable frequency (and
amplitude) they generate. Unfortunately, crystal oscillators cannot be integrated on the same substrate with the circuit,
i.e. conventional quartz oscillators are not IC compatible. The rapid growth of micromachining technologies makes
feasible another mechanical resonator-based approach to realize integrated high-Q tanks and enable new type of sensors
such as gyroscopes, high precision resonating pressure sensors and accelerometers, mass measuring devices
(microbalance), chemical and biological sensors, etc. In this project, we will explore the design, fabrication, and
performance issues of high Q-oscillators utilizing MUMPs processes (PolyMUMPS, SOIMUMPs, PiezoMUMPs) which
can be potentially integrated on the same chip with integrated circuit or using heterogeneous integration. You are
encouraged to read Chapter 21 of your textbook to identify an application for your resonator (you may select the target
application not listed in Chapter 21). However, you are not limited to those applications and can find many exciting
applications in on-line articles, magazines, research papers, patents, etc.
Design Specifications
Your resonator should have a stable frequency of oscillation at 10 kHz, the resonator should be implementable in
Poly-MUMPs , SOIMUMPs, or PiezoMUMPs processes, and the resonator should be able to operate on a 5V lithium
battery. The ONLY SPECIFICATIONS you are required to meet are these three (in bold font). To help you to start
your design process, you are given parameters below for a surface micro-machined oscillator. These parameters are not
your design specifications and don’t have to be met, and are provided merely as a starting point for your design.
Parameter Description Value
Drive mode resonance frequency - requirement !
m Proof mass
Drive mode quality factor 10,000
Amplitude of Oscillation
Sense capacitance associated with the
resonator
Drive capacitance associated with the
resonator
Sense Voltage bias 1[V]
V Voltage produced by the power source 5[V] or less - requirement !
nw ][10 kHz
][102 11 kg-´
nQ
0X ][2 mµ
sC ][4 fF
DC ][4 fF
SV
MAE249/EECS 279: “MicroSensors and Actuators” Fall 2021
University of California - Irvine Ó Copyright, Prof. Andrei M. Shkel
Objective
You need to explore design options presented in the class, discuss advantages and disadvantages of each
option, and propose a design which meets the three specifications above: (1) use one of the MUMPS
processes, (2) 10 kHz drive frequency of operation, (3) 5 [V] power source. Consider different designs of
suspension, electrodes (lateral, parallel, shaped etc.), circuit architecture, tuning possibilities, etc. DO NOT
just reproduce the comb-drive resonator presented during the class. This was just an example.
The specific goal of this project is to design a micro-resonator 1) implemented using a MUMPS process
technology; (2) utilizes the closed loop drive and sense actuation to provide a stable frequency of oscillation
@ 10 kHz; (3) operate on a single lithium micro battery supplying 5V.
System Design
Survey the literature and decide on the basic architecture of the device. (There should be recent literature on
silicon microresonators or sensors utilizing stable microresonators). Prof. Clark Nguyen and his group at
Berkeley have done pioneering work in design and fabrication of MEMS resonators. There are also papers
from Prof. Ayazi group at GeorgiaTech, and the Prof. Roger Howe group at Stanford., Prof. Mina Rais-
Zadeh from University of Michigan, Prof. Thomas Kenny at Stanford, and an early work by Prof. William
Tang (now at UCIrvine). More recently, the group of Prof. Gianluca Piazza from CMU has been productive
(you can find a recent book on-line “Piezoelectric MEMS Resonators”, for example). You are encouraged to
read Chapter 21 of your textbook and find some very recent papers in the electronic collection of the UCI
library. The most recent publications on the topic are highly encouraged. Also, explore some recent industrial
stories and design philosophies on development of clocks from SiTime, Silicon Labs, Discera, Sand9, and
more. You will need to use this information in your final report, when discussing the state of the art.
Review Reader 5 and Reader 6. Look for pros and cons of your design. Create a lumped model to set the design
flow and the electrical performance. Select dimensions and architecture of the mass, suspension, type of
actuator (lateral or parallel plate, single-sided actuation or two-sided actuation, and the drive/sense electrodes).
Be innovative. Learn from designs of others but add something of your own.
Overview
The design process is described below in terms of several distinct tasks. However, it will be quickly recognized
that all these tasks interconnected. The goal of the designer to iterate between the tasks until the final device
design meets requirements.
First-Order Device Concept
Select the materials, geometry, and fabrication process (for example, even if you select Poly-MUMPs, you
can still decide on the layers you want to use – Poly1, Poly2, Poly1+Poly2). This will require a determination
of the device geometry required to achieve the right resonance frequency (a combination of mass and spring
values; you can use as a starting point the parameters provided in the table).
First-Order Circuit Design
Sketch your design. Estimate the parasitic capacitance coupling the resonator ports. Sketch the electro-
mechanical model with the parasitic elements which influence the device’s electrical characteristics.
Select electrode configuration and design a circuit configuration which will drive the device into oscillation at
a stable amplitude. Explore the effects of parasitic elements. Explore how the effect of parasitics can be
eliminated.
MAE249/EECS 279: “MicroSensors and Actuators” Fall 2021
University of California - Irvine Ó Copyright, Prof. Andrei M. Shkel
Coupled Modeling
Explore the interaction between the resonator and the circuit. How the parasitic elements, stochastic noise
elements (such as Brownian Noise), non-linearity in actuation and detection are affecting the characteristics
you are trying to achieve.
Second-order Effects
Since the resonator will be small, how much variation in behavior (e.g., change is resonance frequency) is
expected if fabrication tolerances are within 5%? How much variation is expected if the temperature is
changing from -55F to +85F. How can the device be calibrated or tuned to compensate for fabrication
imperfections and temperature variations ? How will you tune your device to meet the design objective ?
What is the effect of ambient temperature and a possible leak/change of vacuum ? What are the different
energy loss mechanisms? Explore all these options.
Integrate the Design
Iterate as needed to verify that the device concept, circuit design, fabrication process, and packaging scheme
work together to meet the required specification.
Proposed Flow of your project:
1. Decide on the problem you are trying to solve with the resonator (i.e., find some exciting application).
2. Consider as a first iteration of the design the idea of a classical micro-resonator discussed in class or
somebody’s else idea discussed in patents, publications, etc. But remember, you should be able to implement
it in the MUMPS processes and add some of your own ideas !
3. Explore alternative proof-mass, suspension, and electrode designs. Comment on rational of your decisions.
(review Reader 5)
4. Estimate in-plane and out-of-plane frequency of the device. Estimate how much the resonator will move in
out of plane as a result of levitation force. Propose methods for minimizing the out-of-plane motion.
5. Consider Single-sided and Double-sided actuation. Select the type of actuation you think is appropriate.
6. Estimate vacuum packaging requirements to meet the specifications.
7. Decide on the architecture of electrodes meeting the design requirements.
(review Reader 6)
8. Sketch an architecture of the control electronics for the resonator. It should include an oscillator circuit for
driving the device at resonance, stabilizing the amplitude. Derive the gain of the trans-resistance amplifier
that will allow to overcome the damping (decide on the packaging pressure).
9. Perform modeling of the response of the overall electro-mechanical system. Does the proposed architecture
drive the device at resonance? Does the parasitic capacitance have any effect on the device performance? How
these issues can be resolved ? Does the proposed architecture allow the resonator to keep constant amplitude
MAE249/EECS 279: “MicroSensors and Actuators” Fall 2021
University of California - Irvine Ó Copyright, Prof. Andrei M. Shkel
of oscillations? If not, how would you suggest improving the design of the control system? How would you
tune, if needed, the frequency of oscillation?
10. Propose a noise model and parasitic capacitance model of the resonator you designed (also include drive
and sense capacitance). Discuss the effect of model parameters on performance.
11. Address the first-order and the second order design objectives.
Project Proposal
1 page text and 1 page figures (this is your entire proposal). See the submission deadlines below. The style of
this document should grasp attention (well written, nicely formatted, and containing a persuasive description
of your product). No more than one-page text (600 words of text + references) and one page of pictures are
allowed.
Make sure to include the following: (1) Pick a title, reflecting the chosen application of your resonator, (2)
clearly identify the motivational application and the problem your oscillator is trying to solve, (3) perform a
preliminary design and a preliminary analysis showing that the project goals are feasible with your
preliminary design, (4) include at least 5 recent references (2 journal papers, 2 conference papers, 1 patent)
Project Progress Reports
There is no page limit. See the submission deadlines below. In your Progress Report 1 address items 1-7
from the proposed flow of your project (you can change design parameters later if necessary). In your
Progress Report 2 address items 8-11 from the proposed flow of your project (again, you can change design
parameters later if necessary). Your progress reports should address “The first Order Effect” of the design
(see above). Add “The second Order Effects” of your design in the Final Report. Submit your progress report
files, name them your_name_progress_reportX.pdf (I suggest you use the IEEE template, the same template
you will be using for your final report). Upload your progress report files in Canvas.
Submission of your final project
(1) Before the Due Date. Submit a well written report addressing ALL design issues (along the lines of the
proposed design flow). Name your report, your_name_final_project_report.pdf The report should be well
written, 6 pages, using the template provided. The report should include a brief literature survey relevant to
the assigned project (at least 5 recent and highly cited references from the major Journals and Conferences:
at least 2 conference papers, 2 journal papers, 1 patent). You are required to submit on the Due Date:
(1) On Due Date. a hard copy of your final report, (2) upload an electronic copy of your final report
(Upload your file in Canvas):
o Some typical sections of the report: Title, Abstract, Introduction, Theory, Modeling,
(Experiments), Discussion, Conclusions, Acknowledgments, References.
(2) On Due Date. Submit a layout file: your_name_final-project_MUMPs.tdb. Include in the final report the
cross section showing anchors, suspension, electrodes, etc. (you are free to decide what cross-section to pick
to make it a representative cross-section showing the most important features of your design). Upload your
file in Canvas
(3) On Due Date. Submit your Oral presentation slides: your_name_oral_presentation.pdf. Your
presentation is limited to 3 minutes and 3 slides maximum (+1 a title slide). Upload your file in Canvas.
The recommended format:
Slide 0 – Title of your project, reflecting the application of your resonator. Don’t forget to include your name
Slide 1 – The motivational application (find something really, really, really exciting)
MAE249/EECS 279: “MicroSensors and Actuators” Fall 2021
University of California - Irvine Ó Copyright, Prof. Andrei M. Shkel
Slide 2 – Explain your design (sketch of design, layout, electronic schematics). Make it concise and clear
Slide 3 – Show results proving that you met the design objective of the final project and considered all
relevant issues recommended in the design flow (include design parameters, modeling results, etc.)
Project Milestones:
• Nov 4th, project assigned
• Nov. 9th , submit your proposal, discussing application, intended design, and preliminary design
parameters showing that you have a chance meeting project objective with the chosen design
• Nov. 16th . Submit your progress report 1 addressing items 1-7 of the proposed flow above.
• Nov. 23rd . Submit your progress report 2 addressing items 8-11 of the proposed flow above.
• Nov. 30th . Submit your final report (hard copy to be submitted before class and soft copies of
your report, layout, and Power Point slides are uploaded in Canvas)
• Nov. 30th & Dec. 2th. Oral presentations. Your presentation is limited to 5 minutes (4 slides
maximum, including the title slide)
学霸联盟
